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余志明教授 >>中南大学功能薄膜材料研究室

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余志明教授 >>中南大学功能薄膜材料研究室 | solidfilm.cn Reviews
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余志明教授 >>中南大学功能薄膜材料研究室 | solidfilm.cn Reviews

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碳材料的拉曼光谱 从纳米管到金刚石|安德里亚 卡罗. 化学气相沉积 从烃类气体到固体碳|张伟刚|科学出版社. Properties,growth and apllications of diamond. Physics and Applications of CVD Diamond. 材料料学与工程|Dr.阿斯基兰德|晓园出版社.

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研究室现拥有物理气相沉积(PVD)和化学气相沉积(CVD)镀膜设备9套 另有1套在建,2套在研 ,其中配有直流、中频、射频、脉冲等磁控溅射系统5套、热蒸发镀膜系统2套、考夫曼离子枪和射频等离子反溅刻蚀系统各1套 此外,研究室还配备超高真空场发射测试设备、抗干扰电化学工作站、四探针方块电阻测试仪等测试系统若干。 自成立以来,研究室长期以多功能CVD金刚石薄膜为主攻方向,逐渐向光、电、声、磁、热等功能薄膜材料拓展,如今研究方向已涉及工业化PVD/CVD镀膜设备、电真空微器件、微纳传感器、废水有机污染物电化学降解、高导热电子封装复合材料、超硬耐磨抗腐蚀涂层、热致变色智能薄膜、透明导电薄膜、压电铁电薄膜等,先后承担了中瑞(典)政府间合作项目、中瑞(典) 校际合作项目、国家自然科学基金、国家 十五 公关项目、各类配套项目等十余项,并长期与瑞典皇家工学院、英国布里斯托尔大学、澳大利亚蒙纳士大学、广州有色金属研究院、南京三乐电子信息产业集团有限公司、株洲硬质合金集团公司和株洲南方航空动力机械公司等机构开展了全方面的合作与交流。 邮箱: surfacecsu@csu.edu.cn;.

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